Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas. 2000.
Ion beam lithography — By analogy to E beam lithography, focused ion beam lithography scans an ion beam across a surface to form a pattern. The ion beam may be used for directly sputtering the surface, or may induce chemical reactions in the exposed top layer (resist) … Wikipedia
Next-generation lithography — (NGL) is a term used in integrated circuit manufacturing to describe the lithography technologies slated to replace photolithography. As of 2009 the most advanced form of photolithography is immersion lithography, in which water is used as an… … Wikipedia
Maskless lithography — In maskless lithography, the radiation that is used to expose a photosensitive emulsion (or photoresist) is not projected from, or transmitted through, a photomask.[1] Instead, most commonly, the radiation is focused to a narrow beam. The beam is … Wikipedia
Nanoimprint lithography — is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint… … Wikipedia
Electron beam ion trap — (or its acronym EBIT) is used in physics to denote an electromagnetic bottle that produces and confines highly charged ions. It was invented by R. Marrs [Levine et al, 1988] and M. Levine at LLNL.An EBIT uses an electron beam focused by means of… … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Фотонный кристалл — Фотонный кристалл это материал, структура которого характеризуется периодическим изменением показателя преломления в пространственных направлениях[1]. В другой работе[2] встречается расширенное определение фотонных кристаллов … … Википедия
Lithografie mittels fokussierter Ionenstrahlen — fokusuojamoji jonpluoštė litografija statusas T sritis radioelektronika atitikmenys: angl. focused ion beam lithography vok. Lithografie mittels fokussierter Ionenstrahlen, f rus. литография с фокусируемым ионным пучком, f pranc. lithographie par … Radioelektronikos terminų žodynas
fokusuojamoji jonpluoštė litografija — statusas T sritis radioelektronika atitikmenys: angl. focused ion beam lithography vok. Lithografie mittels fokussierter Ionenstrahlen, f rus. литография с фокусируемым ионным пучком, f pranc. lithographie par faisceau ionique focalisé, f … Radioelektronikos terminų žodynas
lithographie par faisceau ionique focalisé — fokusuojamoji jonpluoštė litografija statusas T sritis radioelektronika atitikmenys: angl. focused ion beam lithography vok. Lithografie mittels fokussierter Ionenstrahlen, f rus. литография с фокусируемым ионным пучком, f pranc. lithographie par … Radioelektronikos terminų žodynas
